Watlow’s gas line heaters are designed to regulate temperatures in gas lines in order to prevent condensation in the gas line.
Tetraethyl orthosilicate (TEOS), Boron trichloride (BCl3), Aluminum
Chloride (AlCl3), Chlorine trifluoride (ClF3) and Dichlorosilane (DCS)
are gases that condense or liquefy due to a phase shift at low
temperatures. In semiconductor processes the condensation occurs in the
gas line and puddles in the shower head before being injected into the
vacuum chamber. A substantial number of wafer defects will occur if
liquefied gases are injected into the vacuum chamber. Uniform heating of
the lines with gas line heaters will prevent condensation. TEOS lines
are typically heated above 194°F (90°C) and BCl3 above 86°F (30°C),
depending on pressure and flow rate. The optimum line temperature will
vary depending on the process parameters.
